Spectroscopic ellipsometer V-VASE (Woollam)
FACILITIES / CARACTERIZARI-OPTICE

Technical details :
VASE Woollam equipment for reflection and transmission ellipsometry measurements
- reflection and transmission ellipsometry
- generalization ellipsometry ( anisotropy and birefringence)
- reflectance and transmittance
- scatterometry
- depolarization
Characteristics :
Spectral range :
- 193 up to 2200nm
- 6.4 down to 0.56eV
Automatic set-up between 15 si 90° of the incidence angle
Automatic set-up of the wavelength made by the monochromator
Autoretarder for high accuracy measurements
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