Vacuum Deposition equipment with turbo-molecular pump

FACILITIES / MATERIALS-SYNTHESIS-AND-PROCESSING

Vacuum Deposition equipment with turbo-molecular pump

Technical details

Vacuum evaporation and deposition system with Alcatel turbo-molecular pump (pressure: <1.5×10-5 mbarr) and accessory for film thickness monitoring during deposition type Sigma Instruments SQC-330 Deposition Controller.


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