Project: PN-IV-P7-7.1-PED-2024-2412

Title: Automatic chemical vapor deposition system for the production of two-dimensional nanomaterials

Contractor: National Institute of Materials Physics (NIMP)

Project leader: Dr. Alin Velea

Project type: Demonstration experimental project (PED)

Start date: 03/01/2025

End date: 31/12/2026

Contracting Authority: UEFISCDI

Abstract:

A low cost chemical vapor deposition (CVD) system will be designed, built and automated within this project. This CVD system will produce 2D materials such as graphene and transition metal dichalcogenides of high quality, comparable to that obtained with expensive equipment. The system will be capable of both deposition at atmospheric and low pressures, growth temperatures up to 1100 - 1200 ˚C and substrates up to 20 mm. In addition, with the detailed recording of the parameters and recipes, the previous depositions will be checked quickly for any problems or repeated, allowing the rapid debugging of the system and the high reproducibility of the process. As designed, with a modular structure, the system has the advantage of being easy to extend and adapt to specific needs, facilitating creativity and innovation. The automation software will be designed to be simple and intuitive, allowing for depositions with minimal changes to process variables.

The impact of the project, from an economic perspective, consists in the fact that can be a unique product on the Romanian market, useful both in the scientific and in the industrial environment, helping to accelerate and improve the process of discovering advanced functional materials with specific properties which have a significant impact in the semiconductor industry.