Clean room (including five chemical fume hoods, spin coater equipment, electric stoves with programmable temperature, RIE and metallization equipment)
FACILITIES / CLEANROOM-LABORATORIES
The Clean room is designed for research that is needed in order to obtain new heterostructures with applications in microelectronics, optoelectronics, renewable energy, advanced sensors, medicine, etc. The Clean room has an area of about 235 m2, from which 20 m2 Class 100 (ISO 5), 50 m2 Class 1000 (ISO 6) and 130 m2 Class 10,000 (ISO 7) and two lockers, one with an air shower.
Between the premises of different classes, there are pass throughs installed in order to facilitate the transfer of samples. The HVAC system, the parameters monitoring and access control are automated and computer controlled. Chemical fume hoods are equipped with running water, ultrapure deionized water dispenser, Millipore Q-bridge type, and blow dry N2 gun.
Copyright © 2023 National Institute of Materials Physics. All Rights Reserved