Multimethod system for surface analysis (XPS, MBE, STM)

A complex cluster for surface and interface science (Specs, Fig. 1), composed by: (i) a chamber for photoelectron spectroscopy (XPS, ESCA, UPS, AES); (ii) a molecular beam epitaxy (MBE) chamber with in situ follow-up by low energy electron diffraction (LEED) and reflection high energy electron diffraction (RHEED) and residual gas analysis; (iii) a chamber for scanning tunneling microscopy and spectroscopy (STM/STS); (iv) load-lock and storage of samples in ultrahigh vacuum.