Scanning Electron Microscope Lyra 3XMU with Focused Ion Beam SEM-FIB sample preparation system (Tescan) with EBSD and EDS analysis systems (Bruker)

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Scanning Electron Microscope Lyra 3XMU with Focused Ion Beam SEM-FIB sample preparation system (Tescan) with EBSD and EDS analysis systems (Bruker)
Working modes and technical specifications
FIB
  • Ga source, 1500 h lifetime
  • Accelerating voltage: 0.5 – 30 kV
  • Detectors: secondary electrons (SE)
  • Resolution: 5 nm at 30 kV
SEM
  • Field Emission Gun (FEG)
  • Accelerating voltage: 200 V – 30 kV
  • Detectors: secondary electrons (SE),
  • backscattered electrons (BE)
  • Resolution SE: 1.2 nm at 30 kV in High Vacuum Mode
  • 1.5 nm at 30 kV in Low Vacuum Mode
  • Resolution BSE: 2.0 nm at 30 kV
EDS
  • Bruker Quantax 200, Peltier cooled X-ray detector
  • Energy resolution: 133 eV for Mn Ka
  • Working modes: spot, line profile, 2D mapping
EBSD
  • Bruker e-Flash 1000
  • Pattern acquisition rate – up to 880 patterns/sec
  • Pattern indexation rate – up to 750 patterns/sec for single phase

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