Vacuum thermal evaporation system for deposition of thin films, model VUP-5

Technical description:
– thermal evaporation in tantalum boats of chunks or powdered material under vacuum;

Performances:
Vacuum level at deposition start:       2 x 10^-5 Torr,

Deposition rate:                                  10…1000 nm/min;

Maximum sample size:                       50 mm x 50 mm.                     .