SURFACE systems+technology GmbH & Co. KG

SURFACE systems+technology GmbH & Co. KG hybrid system for thin films synthesis from temperature-sensitive materials by (i) Matrix Assisted Pulsed Laser Deposition (MAPLE) and (ii) PLD, constituted of: a deposition chamber with in-situ freezing facilities for targets (e.g., frozen suspensions of organic materials or inorganic nanoparticles in a support matrix); a KrF excimer laser with 248 nm wavelength, 1 – 10 Hz repetition rate, and 700 mJ maximum power; maximum heating temperature of the substrate: 600 °C.